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ADXL330 Scheda tecnica(PDF) 11 Page - Analog Devices |
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ADXL330 Scheda tecnica(HTML) 11 Page - Analog Devices |
11 / 16 page ADXL330 Rev. A | Page 11 of 16 THEORY OF OPERATION The ADXL330 is a complete 3-axis acceleration measurement system on a single monolithic IC. The ADXL330 has a measure- ment range of ±3 g minimum. It contains a polysilicon surface micromachined sensor and signal conditioning circuitry to implement an open-loop acceleration measurement architecture. The output signals are analog voltages that are proportional to acceleration. The accelerometer can measure the static accelera- tion of gravity in tilt sensing applications as well as dynamic acceleration resulting from motion, shock, or vibration. The sensor is a polysilicon surface micromachined structure built on top of a silicon wafer. Polysilicon springs suspend the structure over the surface of the wafer and provide a resistance against acceleration forces. Deflection of the structure is meas- ured using a differential capacitor that consists of independent fixed plates and plates attached to the moving mass. The fixed plates are driven by 180° out-of-phase square waves. Acceleration deflects the moving mass and unbalances the differential capacitor resulting in a sensor output whose amplitude is proportional to acceleration. Phase-sensitive demodulation techniques are then used to determine the magnitude and direction of the acceleration. The demodulator output is amplified and brought off-chip through a 32 kΩ resistor. The user then sets the signal band- width of the device by adding a capacitor. This filtering improves measurement resolution and helps prevent aliasing. MECHANICAL SENSOR The ADXL330 uses a single structure for sensing the X, Y, and Z axes. As a result, the three axes sense directions are highly orthogonal with little cross axis sensitivity. Mechanical mis- alignment of the sensor die to the package is the chief source of cross axis sensitivity. Mechanical misalignment can, of course, be calibrated out at the system level. PERFORMANCE Rather than using additional temperature compensation circuitry, innovative design techniques ensure high performance is built-in to the ADXL330. As a result, there is neither quantization error nor nonmonotonic behavior, and temperature hysteresis is very low (typically less than 3 mg over the −25°C to +70°C temperature range). Figure 14, Figure 15, and Figure 16 show the zero g output performance of eight parts (X-, Y-, and Z-axis) soldered to a PCB over a −25°C to +70°C temperature range. Figure 26, Figure 27, and Figure 28 demonstrate the typical sensitivity shift over temperature for supply voltages of 3 V. This is typically better than ±1% over the −25°C to +70°C temperature range. |
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