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SM5430/SM5470
CHARACTERISTICS FOR SM5430/SM5470 - SPECIFICATIONS
All parameters measure at 5V excitation at room temperature, unless otherwise specified.
All Models
Parameter
Min.
Typ.
Max.
Units
Notes
Excitation Voltage
0
5.0
10.0
V
Excitation Current
0
1.5
3.0
mA
Offset
SM5470
SM5430
-75
-50
-30
0
+25
+50
mV
mV
TC Span
-15
-19
-24
%FS/100
°C
1
TC Resistance
33
28
25
%/100
°C
1
Bridge Impedance
2.7
3.3
4.0
k
Ω
Operating Temp
-40
85
°C
Storage Temp
-55
125
°C
SM5430 Standard Pressure Series
Span (FS Range), PSI (kPa)
Min.
Typ.
Max.
Units
Notes
5 (34)
75
100
125
mV
3
15 (103)
105
145
175
mV
3
30 (207)
115
165
195
mV
3
60 (414)
115
180
220
mV
3
100 (689)
115
200
250
mV
3
Linearity
-0.2
+ 0.07
+0.2
%FS
4
TC Offset
-5
-1
+5
%FS/100
°C
1
Burst Pressure
>5X
Rated FS Pressure
2
SM5470 Low Pressure Series Only
Span (FS Range), PSI (kPa)
Min.
Typ.
Max.
Units
Notes
0.15 (1.03)
25
50
85
mV
3
0.30 (2.07)
25
50
85
mV
3
0.80 (5.52)
25
50
85
mV
3
1.50 (10.3)
25
50
85
mV
3
3.00 (20.7)
25
50
85
mV
3
Linearity
-0.3
+ 0.1
+0.3
%FS
4
TC Offset
+ 12
%FS/100
°C
1
Burst Pressure
15X
Rated FS Pressure
2
Notes:
1. Measured from 0 to 70
°C
2. Sensor die will survive pressure specified for all ranges. Maximum package pressure is 150 PSI.
3. Measured at 5V, constant voltage excitation
4. Defined s best-fit straight line (BFSL); for 0.3 PSI full-scale, linearity is + 0.5%FS. For 0.15 PSI full-scale, linearity is + 2.5%FS.
ORDERING INFORMATION
Pressure Type
A: Absolute (except 5470)
G: Gauge
D: Differential
Available Cap Type
B: Horizontal Barbed port(s)
C: Vertical Barbed port(s)
Low Pressure
Ranges
PSI
5470
0.15
001
0.30
003
0.80
008
1.50
015
3.00
030
Std. Pressure
Ranges
PSI
5430
5
005
15
015
30
030
60
060
100
100
SM5470 - 008 - G - B
2004-2006
Silicon Microstructures, Inc.
♦ 1701 McCarthy Blvd. ♦ Milpitas, CA 95035 USA
Tel: 408-577-0100
♦ Fax: 408-577-0123 ♦ sales@si-micro.com ♦ www.si-micro.com
Rev 1.3 07_06